TY - JOUR
T1 - Microelectronics and microdosimetry
AU - Dicello, J. F.
N1 - Funding Information:
* This work is partially supported by the US Air Force.
PY - 1987/4/3
Y1 - 1987/4/3
UR - http://www.scopus.com/inward/record.url?scp=0022700310&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0022700310&partnerID=8YFLogxK
U2 - 10.1016/S0168-583X(87)80308-7
DO - 10.1016/S0168-583X(87)80308-7
M3 - Article
AN - SCOPUS:0022700310
SN - 0168-583X
VL - 24-25
SP - 1044
EP - 1049
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - PART 2
ER -